Electroless selective deposition of gold nano-array for silicon nanowires growth

E.  Ruiz-Gomes; C.  Herrier; A.  Benkouider; P.  Sudraud; A.  Delobbe; A.  Ronda; I.  Berbezier

Electroless selective deposition of gold nano-array for silicon nanowires growth

E. Ruiz-Gomes

C. Herrier

A. Benkouider

P. Sudraud

A. Delobbe

A. Ronda

I. Berbezier

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Abstract

Nanopatterns of gold clusters on a large surface of oriented Si(111) substrates, from the galvanic displacement of gold salt (via the spontaneous reduction of AuCl4-), are demonstrated in this work. The Si substrate is patterned by Focused Ion Beam (FIB) prior to being dipped in a gold solution. Here, we show that these patterns lead to successful control of the position and size of gold clusters. Sequential patterning reveals a powerful maskless alternative to surface preparation prior to Si nanowire growth.

Keywords: Silicon Gold Galvanic displacement FIB patterning Lithography Nanostructures Nanowires

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References

Stewart, M. E. et al. Chem. Rev. 108, 494 (2008).
Campion, A. & Kambhampati, P. Chem. Soc. Rev. 27, 241 (1998).
Chou, Y.-C. et al. ACS Nano 6, 6407 (2012).
Magagnin, L., Maboudian, R. & Carraro, C. J. Phys. Chem. B 106, 401 (2002).
Porter, L. A. et al. Nano Letters 2, 1369 (2002).
Fabre, B., Hennous, L., Ababou-Girard, S. & Meriadec, C. ACS appl. Mat. Int. 5, 338 (2013).
Piscopiello, E. et al. Phys. Rev. B 78, 035305 (2008).
Warren, S. et al. Surf. Sci. 496, 287 (2002).
Sayed, S. Y. et al. ACS nano 3, 2809 (2009).
Sugimura, H. & Nakagiri, N. Appl. Phys. Lett. 66, 1430 (1995).
Carraro, C., Magagnin, L. & Maboudian, R. Electrochimica Acta 47, 2583 (2002).
Magagnin, L., Bertani, V., Cavallotti, P. L., Maboudian, R. & Carraro, Microelec. Eng. 64, 479 (2002).
Fabre, B. & Herrier, C. RSC Advances 2, 168 (2012).
Carraro, C., Maboudian, R. & Magagnin, L. Surf. Sci. Rep. 62, 499 (2007).
Srinivasan, R. Kinetic J. Electrochem. Soc. 146, 570 (1999).
Gutés, A., Carraro, C. & Maboudian, R. ACS appl. Mat. Int. 3, 1581 (2011).
Kimin Jun, and Joseph M. Nano Lett. 10, 2777–2782 (2010).
Blackman, J. A. & Wilding, A. Europhysics Letters 16, 115 (1991).
Ji, C., Oskam, G. & Searson, P. C. Surf. Sci. 492, 115 (2001).
Aizawa, M. & Buriak, J. M. JACS 127, 8932 (2005).
Shimizu, T., Senz, S., Shingubara, S. & Gösele, U. Appl. Phys. A 87, 607 (2007).
Shimizu, T. et al. Adv. Mat. 19, 917 (2007).
Wagner, R. S. & Ellis, W. C. Appl. Phys. Lett. 4, 89 (1964).
Wu, Y. & Yang, P. JACS 123, 3165 (2001).
Marcus, I. C. et al. Crystal Growth & Design 11, 3190 (2011).
Cui, Y., Lauhon, L. J., Gudiksen, M. S., Wang, J. & Lieber, C. M. Appl. Phys. Lett. 78, 2214 (2001).
Gao, D. et al. JACS 127, 4574 (2005).
Tseng, C.-H., Tambe, M. J., Lim, S. K., Smith, M. J. & Gradečak, S. Nanotechnology 21, 165605 (2010).
Cerruti, M., Doerk, G., Hernandez, G., Carraro, C. & Maboudian, R. Langmuir 26, 432 (2010).
Magagnin, L., Maboudian, R. & Carraro, C. Electrochemical and Solid-State Letters 4, C5 (2001).
Paulo, A. S. et al. Nano letters 7, 1100–4 (2007).
Hutter, E. & Fendler, J. H. Adv. Mat. 16, 1685–1706 (2004).

How to Cite

Ruiz-Gomes, E. ., Herrier, C. ., Benkouider, A. ., Sudraud, P. ., Delobbe, A. ., Ronda, A. ., & Berbezier, I. . (2013). Electroless selective deposition of gold nano-array for silicon nanowires growth. Nanofabrication, 1, 1–7. Retrieved from https://eaapublishing.org/journals/index.php/nanofab/article/view/283

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E. Ruiz-Gomes

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C. Herrier

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A. Benkouider

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P. Sudraud

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A. Delobbe

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A. Ronda

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I. Berbezier

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[1] Stewart, M. E. et al. Chem. Rev. 108, 494 (2008).

[2] Campion, A. & Kambhampati, P. Chem. Soc. Rev. 27, 241 (1998).

[3] Chou, Y.-C. et al. ACS Nano 6, 6407 (2012).

[4] Magagnin, L., Maboudian, R. & Carraro, C. J. Phys. Chem. B 106, 401 (2002).

[5] Porter, L. A. et al. Nano Letters 2, 1369 (2002).

[6] Fabre, B., Hennous, L., Ababou-Girard, S. & Meriadec, C. ACS appl. Mat. Int. 5, 338 (2013).

[7] Piscopiello, E. et al. Phys. Rev. B 78, 035305 (2008).

[8] Warren, S. et al. Surf. Sci. 496, 287 (2002).

[9] Sayed, S. Y. et al. ACS nano 3, 2809 (2009).

[10] Sugimura, H. & Nakagiri, N. Appl. Phys. Lett. 66, 1430 (1995).

[11] Carraro, C., Magagnin, L. & Maboudian, R. Electrochimica Acta 47, 2583 (2002).

[12] Magagnin, L., Bertani, V., Cavallotti, P. L., Maboudian, R. & Carraro, Microelec. Eng. 64, 479 (2002).

[13] Fabre, B. & Herrier, C. RSC Advances 2, 168 (2012).

[14] Carraro, C., Maboudian, R. & Magagnin, L. Surf. Sci. Rep. 62, 499 (2007).

[15] Srinivasan, R. Kinetic J. Electrochem. Soc. 146, 570 (1999).

[16] Gutés, A., Carraro, C. & Maboudian, R. ACS appl. Mat. Int. 3, 1581 (2011).

[17] Kimin Jun, and Joseph M. Nano Lett. 10, 2777–2782 (2010).

[18] Blackman, J. A. & Wilding, A. Europhysics Letters 16, 115 (1991).

[19] Ji, C., Oskam, G. & Searson, P. C. Surf. Sci. 492, 115 (2001).

[20] Aizawa, M. & Buriak, J. M. JACS 127, 8932 (2005).

[21] Shimizu, T., Senz, S., Shingubara, S. & Gösele, U. Appl. Phys. A 87, 607 (2007).

[22] Shimizu, T. et al. Adv. Mat. 19, 917 (2007).

[23] Wagner, R. S. & Ellis, W. C. Appl. Phys. Lett. 4, 89 (1964).

[24] Wu, Y. & Yang, P. JACS 123, 3165 (2001).

[25] Marcus, I. C. et al. Crystal Growth & Design 11, 3190 (2011).

[26] Cui, Y., Lauhon, L. J., Gudiksen, M. S., Wang, J. & Lieber, C. M. Appl. Phys. Lett. 78, 2214 (2001).

[27] Gao, D. et al. JACS 127, 4574 (2005).

[28] Tseng, C.-H., Tambe, M. J., Lim, S. K., Smith, M. J. & Gradečak, S. Nanotechnology 21, 165605 (2010).

[29] Cerruti, M., Doerk, G., Hernandez, G., Carraro, C. & Maboudian, R. Langmuir 26, 432 (2010).

[30] Magagnin, L., Maboudian, R. & Carraro, C. Electrochemical and Solid-State Letters 4, C5 (2001).

[31] Paulo, A. S. et al. Nano letters 7, 1100–4 (2007).

[32] Hutter, E. & Fendler, J. H. Adv. Mat. 16, 1685–1706 (2004).