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Electroless selective deposition of gold nano-array for silicon nanowires growth

  • E. Ruiz-Gomes
  • C. Herrier
  • A. Benkouider
  • P. Sudraud
  • A. Delobbe
  • A. Ronda
  • I. Berbezier

Abstract

Nanopatterns of gold clusters on a large surface of oriented Si(111) substrates, from the galvanic displacement of gold salt (via the spontaneous reduction of AuCl4-), are demonstrated in this work. The Si substrate is patterned by Focused Ion Beam (FIB) prior to being dipped in a gold solution. Here, we show that these patterns lead to successful control of the position and size of gold clusters. Sequential patterning reveals a powerful maskless alternative to surface preparation prior to Si nanowire growth.

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References

  1. Stewart, M. E. et al. Chem. Rev. 108, 494 (2008).
  2. Campion, A. & Kambhampati, P. Chem. Soc. Rev. 27, 241 (1998).
  3. Chou, Y.-C. et al. ACS Nano 6, 6407 (2012).
  4. Magagnin, L., Maboudian, R. & Carraro, C. J. Phys. Chem. B 106, 401 (2002).
  5. Porter, L. A. et al. Nano Letters 2, 1369 (2002).
  6. Fabre, B., Hennous, L., Ababou-Girard, S. & Meriadec, C. ACS appl. Mat. Int. 5, 338 (2013).
  7. Piscopiello, E. et al. Phys. Rev. B 78, 035305 (2008).
  8. Warren, S. et al. Surf. Sci. 496, 287 (2002).
  9. Sayed, S. Y. et al. ACS nano 3, 2809 (2009).
  10. Sugimura, H. & Nakagiri, N. Appl. Phys. Lett. 66, 1430 (1995).
  11. Carraro, C., Magagnin, L. & Maboudian, R. Electrochimica Acta 47, 2583 (2002).
  12. Magagnin, L., Bertani, V., Cavallotti, P. L., Maboudian, R. & Carraro, Microelec. Eng. 64, 479 (2002).
  13. Fabre, B. & Herrier, C. RSC Advances 2, 168 (2012).
  14. Carraro, C., Maboudian, R. & Magagnin, L. Surf. Sci. Rep. 62, 499 (2007).
  15. Srinivasan, R. Kinetic J. Electrochem. Soc. 146, 570 (1999).
  16. Gutés, A., Carraro, C. & Maboudian, R. ACS appl. Mat. Int. 3, 1581 (2011).
  17. Kimin Jun, and Joseph M. Nano Lett. 10, 2777–2782 (2010).
  18. Blackman, J. A. & Wilding, A. Europhysics Letters 16, 115 (1991).
  19. Ji, C., Oskam, G. & Searson, P. C. Surf. Sci. 492, 115 (2001).
  20. Aizawa, M. & Buriak, J. M. JACS 127, 8932 (2005).
  21. Shimizu, T., Senz, S., Shingubara, S. & Gösele, U. Appl. Phys. A 87, 607 (2007).
  22. Shimizu, T. et al. Adv. Mat. 19, 917 (2007).
  23. Wagner, R. S. & Ellis, W. C. Appl. Phys. Lett. 4, 89 (1964).
  24. Wu, Y. & Yang, P. JACS 123, 3165 (2001).
  25. Marcus, I. C. et al. Crystal Growth & Design 11, 3190 (2011).
  26. Cui, Y., Lauhon, L. J., Gudiksen, M. S., Wang, J. & Lieber, C. M. Appl. Phys. Lett. 78, 2214 (2001).
  27. Gao, D. et al. JACS 127, 4574 (2005).
  28. Tseng, C.-H., Tambe, M. J., Lim, S. K., Smith, M. J. & Gradečak, S. Nanotechnology 21, 165605 (2010).
  29. Cerruti, M., Doerk, G., Hernandez, G., Carraro, C. & Maboudian, R. Langmuir 26, 432 (2010).
  30. Magagnin, L., Maboudian, R. & Carraro, C. Electrochemical and Solid-State Letters 4, C5 (2001).
  31. Paulo, A. S. et al. Nano letters 7, 1100–4 (2007).
  32. Hutter, E. & Fendler, J. H. Adv. Mat. 16, 1685–1706 (2004).

How to Cite

Electroless selective deposition of gold nano-array for silicon nanowires growth. (2013). Nanofabrication, 1, 1-7. https://eaapublishing.org/journals/index.php/nanofab/article/view/283

How to Cite

Electroless selective deposition of gold nano-array for silicon nanowires growth. (2013). Nanofabrication, 1, 1-7. https://eaapublishing.org/journals/index.php/nanofab/article/view/283

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Copyright (c) 2013 E. Ruiz-Gomes, C. Herrier, A. Benkouider, P. Sudraud, A. Delobbe, A. Ronda, I. Berbezier

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This work is licensed under a Creative Commons Attribution-NoDerivatives 4.0 International License.