Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives. Nanofabrication, [S. l.], v. 1, n. 1, p. 35–52, 2014. Disponível em: https://eaapublishing.org/journals/index.php/nanofab/article/view/285. Acesso em: 9 apr. 2025.